JPS4849376A - - Google Patents
Info
- Publication number
- JPS4849376A JPS4849376A JP46083308A JP8330871A JPS4849376A JP S4849376 A JPS4849376 A JP S4849376A JP 46083308 A JP46083308 A JP 46083308A JP 8330871 A JP8330871 A JP 8330871A JP S4849376 A JPS4849376 A JP S4849376A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46083308A JPS4849376A (en]) | 1971-10-22 | 1971-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46083308A JPS4849376A (en]) | 1971-10-22 | 1971-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4849376A true JPS4849376A (en]) | 1973-07-12 |
Family
ID=13798772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46083308A Pending JPS4849376A (en]) | 1971-10-22 | 1971-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4849376A (en]) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5117454U (en]) * | 1974-07-26 | 1976-02-07 | ||
| JPS55111165U (en]) * | 1980-02-20 | 1980-08-05 | ||
| JPS56134744U (en]) * | 1981-01-22 | 1981-10-13 | ||
| JPH02301948A (ja) * | 1989-05-17 | 1990-12-14 | Hitachi Ltd | 電子線装置 |
| JPH0329249A (ja) * | 1990-06-12 | 1991-02-07 | Seiko Instr Inc | 集束イオンビーム装置 |
| JP2010182466A (ja) * | 2009-02-04 | 2010-08-19 | Jeol Ltd | 冷陰極電子銃の自動入射軸合わせ方法 |
| JP2018010928A (ja) * | 2016-07-12 | 2018-01-18 | 株式会社ニューフレアテクノロジー | 電子ビーム描画装置及び電子ビーム描画方法 |
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1971
- 1971-10-22 JP JP46083308A patent/JPS4849376A/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5117454U (en]) * | 1974-07-26 | 1976-02-07 | ||
| JPS55111165U (en]) * | 1980-02-20 | 1980-08-05 | ||
| JPS56134744U (en]) * | 1981-01-22 | 1981-10-13 | ||
| JPH02301948A (ja) * | 1989-05-17 | 1990-12-14 | Hitachi Ltd | 電子線装置 |
| JPH0329249A (ja) * | 1990-06-12 | 1991-02-07 | Seiko Instr Inc | 集束イオンビーム装置 |
| JP2010182466A (ja) * | 2009-02-04 | 2010-08-19 | Jeol Ltd | 冷陰極電子銃の自動入射軸合わせ方法 |
| JP2018010928A (ja) * | 2016-07-12 | 2018-01-18 | 株式会社ニューフレアテクノロジー | 電子ビーム描画装置及び電子ビーム描画方法 |